JPS6186929U - - Google Patents
Info
- Publication number
- JPS6186929U JPS6186929U JP17043084U JP17043084U JPS6186929U JP S6186929 U JPS6186929 U JP S6186929U JP 17043084 U JP17043084 U JP 17043084U JP 17043084 U JP17043084 U JP 17043084U JP S6186929 U JPS6186929 U JP S6186929U
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic cleaning
- wafer cassette
- wafer
- horizontal part
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17043084U JPS6186929U (en]) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17043084U JPS6186929U (en]) | 1984-11-12 | 1984-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6186929U true JPS6186929U (en]) | 1986-06-07 |
Family
ID=30728139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17043084U Pending JPS6186929U (en]) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6186929U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02207526A (ja) * | 1989-02-07 | 1990-08-17 | Tokyo Electron Ltd | 枚葉式洗浄装置及び洗浄方法 |
| JPH0381628U (en]) * | 1989-12-13 | 1991-08-21 |
-
1984
- 1984-11-12 JP JP17043084U patent/JPS6186929U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02207526A (ja) * | 1989-02-07 | 1990-08-17 | Tokyo Electron Ltd | 枚葉式洗浄装置及び洗浄方法 |
| JPH0381628U (en]) * | 1989-12-13 | 1991-08-21 |